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STANDARD PLASMA SYSTEM FEMTO[ PLASMA CLEANER - PLASMA ETCHER - PLASMA ASHER - PLASMA ACTIVATION ]The FEMTO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner. Give us a call! We´d be happy to discuss more details. Tel.: +49 (0) 7458 - 999 31 - 0 Brochure FEMTO (PDF 1007 KB) Basic configuration - The outer body varies depending on the components / options- Chamber volume: depending on the version 1,9 - 6 liters - Power supply: 230 V AC for table top systems or 400 V AC / 3 phases for stand alone systems Gas supply - Needle valve- Mass-Flow-Controller (MFCs) Vacuum chambers - Stainless steelround with cover (approx. Ø 100 mm, L 278 mm oder L 600 mm) or rectangular with hinged door (approx. W 103 x H 103 x D 285 mm) - Aluminium round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm) - Quartzglass (UHP) round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm) - Borosilicate glass (UHP) round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm) Loading with Tray (option: water-cooled), quartz glass boat,rotary drum for powder, rotary drum for bulk materials, flat tray Aluminium, flat tray stainless steel, flat tray borosilicate glass, flat tray quartz glass Electrodes - One or multi level electrode- RIE - electrode Control - Semi automatic- PCCE-Control (Microsoft Windows CE) - PC-Control (Microsoft Windows XPE) Timer - DigitalGenerator Frequencies: 40 kHz: Power 0 - 100 W; 0 - 1000 W13.56 MHz: Power 0 - 50 W; 0 - 300 W 2.45 GHz: Power 0 - 100 W; 0 - 300 W All generators are continuously adjustable from 0 - 100% Vacuum pump - in different sizes from different manufacturers(As required with active carbon filter) More options Spare parts sets, pressure gauge, corrosive gas version, gasbottle, pressure reducer, heating plate, temperature indicator, heatable chamber, faraday box, polymerization equipment , test ink set, oxygen-generator, slow ventilation of the vacuum chamber, slow pump down of the vacuum chamber, TEM sample holder flange, maintenance / service, documentation in national language, installation on site.Here are some examples of our |
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