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STANDARD PLASMA SYSTEMS
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[ RF-GENERATORS - 13.56 MHz - 100 watts]
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Application range in plasma systems:
- low pressure plasma
- dielectric heating
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RF generator 13.56 MHz, 100 W |
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- Rated RF power output: 100 Watts
- Frequency: 13.560 MHz ± 100ppm
- Adjustable RF power range :
0 - 100 Watts, continous
- Generator can be pulsed:
Min. on-time: 5µs
- Impedance: 50 Ohms
- RF stability: less than 5 %
(depends on the adjusting device)
- Load missmatch protection (built-in) against open output and short circuit
- Regulation tolerance load:
VSWR = 1.2
- Capable of switching power to 100 % immediately
- Mains input : 88 - 264 VAC / 47 - 63 Hz
(when combined with external power supply )
- Mains power consumption:
max. 220 Watts
- Remote interface connector intended
for :
- RF switch ON/OFF
- RF power adjustment
(0...10V = 0...100%)
- RF output: N connector
- Power connector : for external
power supply
- Weight: approx. 6.5 kg (generator)
plus 1.0 kg (power supply) |
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RF generator 100 |
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Please contact us because of technical advice for these systems. |
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