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PLASMA SYSTEMS - CONTROL
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[ PLASMA TECHNOLOGY: PROGRAMMING FOR PLASMA CLEANER - PLASMA ETCHER - PLASMA ASHER - PLASMA ACTIVATION ]
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The control
is based on a PC with industrial field bus. Data can be stored by
an Microsoft EXCEL file. Parameters to set:
- max. pump down time
- gas mass flow (ratios)
- process pressure
- pressure stabilisation time
- power
- process time
- flushing time
- ventilation time
- deviation limits
- sub programs
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Menu for the programming of the working process |
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