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Technical Data:
Plasma cleaner FEMTO
switchgear cabinet:
W 345 mm, H 220 mm, D 420 mm
chamber:
Ø 100 mm, L 270 mm
chamber volume:
approx. 2 litre
gas supply:
one gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by timer
options / accessories
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Plasma system FEMTO: Process development, cleaning, activating, etching
(small series)
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