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Technical Data:
Plasma etcher TETRA-100-LF-PC
switchgear cabinet:
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 400 mm, D 625 mm, H 400 mm
chamber volume:
approx. 100 litres
gas supply:
max. 3 gas channels through MFC
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D40B (40 m³/h)
trays:
up to 10 trays
(optional: rotary drum)
control:
PC control (Windows)
options / accessories
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Plasma system TETRA-100-LF-PC for cleaning, activation and etching
in production.
Sixfold tray and rotary drum for TETRA plasma systems. |
